Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds

标题
Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 1, Pages 64-74
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2010-01-05
DOI
10.1109/jmems.2009.2037440

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