New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films

On-chip test structure suite for free-standing metal film mechanical property testing, Part I – Analysis

(2008) Maarten P. de Boer et al.   ACTA MATERIALIA

In situ TEM observations of fast grain-boundary motion in stressed nanocrystalline aluminum films

(2008) Marc Legros et al.   ACTA MATERIALIA

Analysis of a Passive Sensor for Predicting Process-Induced Stress in Advanced Integrated Circuit Interconnect

(2008) B.J. Gallacher et al.   IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Fracture Toughness, Fracture Strength, and Stress Corrosion Cracking of Silicon Dioxide Thin Films

(2008) V. Hatty et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Measurements of near-ultimate strength for multiwalled carbon nanotubes and irradiation-induced crosslinking improvements

(2008) Bei Peng et al.   Nature Nanotechnology

Grain-size stabilization by impurities and effect on stress-coupled grain growth in nanocrystalline Al thin films

(2007) D.S. Gianola et al.   MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING