A Six-Axis MEMS Force–Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 18, Issue 2, Pages 433-441

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2009-02-14

DOI

10.1109/jmems.2009.2013387

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