A Compliance-Based Microflow Stabilizer

标题
A Compliance-Based Microflow Stabilizer
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 3, Pages 539-546
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-06-03
DOI
10.1109/jmems.2009.2021826

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