Discharge-Based Pressure Sensors for High-Temperature Applications Using Three-Dimensional and Planar Microstructures

标题
Discharge-Based Pressure Sensors for High-Temperature Applications Using Three-Dimensional and Planar Microstructures
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 3, Pages 736-743
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-04-24
DOI
10.1109/jmems.2009.2017110

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