An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

标题
An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 5, Pages 1004-1015
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2009-07-28
DOI
10.1109/jmems.2009.2023838

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