Room-Temperature Fabrication of Anodic Tantalum Pentoxide for Low-Voltage Electrowetting on Dielectric (EWOD)

标题
Room-Temperature Fabrication of Anodic Tantalum Pentoxide for Low-Voltage Electrowetting on Dielectric (EWOD)
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 6, Pages 1481-1488
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-11-13
DOI
10.1109/jmems.2008.2006827

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