A Novel Bistable Two-Way Actuated Out-of-Plane Electrothermal Microbridge

标题
A Novel Bistable Two-Way Actuated Out-of-Plane Electrothermal Microbridge
作者
关键词
-
出版物
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 1, Pages 58-69
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2008-02-12
DOI
10.1109/jmems.2007.911369

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