Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

出版年份 2018 全文链接

标题

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

作者

关键词

-

出版物

Journal of Micro-Nanolithography MEMS and MOEMS

Volume 17, Issue 03, Pages 1

出版商

SPIE-Intl Soc Optical Eng

发表日期

2018-08-22

DOI

10.1117/1.jmm.17.3.031203

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

© Peeref 2019-2024. All rights reserved.