Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separation

标题
Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separation
作者
关键词
-
出版物
JOURNAL OF MEMBRANE SCIENCE
Volume 329, Issue 1-2, Pages 130-137
出版商
Elsevier BV
发表日期
2008-12-25
DOI
10.1016/j.memsci.2008.12.028

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