Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory

标题
Size-dependent dynamic pull-in analysis of beam-type MEMS under mechanical shock based on the modified couple stress theory
作者
关键词
MEMS, Mechanical shock, Electrostatic actuation, Modified couple stress theory
出版物
APPLIED MATHEMATICAL MODELLING
Volume 39, Issue 2, Pages 934-946
出版商
Elsevier BV
发表日期
2014-07-25
DOI
10.1016/j.apm.2014.07.019

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