Excimer laser crystallization of InGaZnO4 on SiO2 substrate

标题
Excimer laser crystallization of InGaZnO4 on SiO2 substrate
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 22, Issue 11, Pages 1694-1696
出版商
Springer Nature
发表日期
2011-03-24
DOI
10.1007/s10854-011-0347-4

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