Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O

标题
Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 20, Issue 12, Pages 1255-1259
出版商
Springer Nature
发表日期
2009-03-04
DOI
10.1007/s10854-009-9861-z

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