期刊
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
卷 20, 期 -, 页码 303-306出版社
SPRINGER
DOI: 10.1007/s10854-008-9595-3
关键词
-
Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO2 thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C10H14O5) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around 550 A degrees C and the rutile phase starts to form at 620 A degrees C. The anatase phase completely transforms into the rutile phase at 680 A degrees C. We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of the phase of TiO2 thin films.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据