Gas phase equilibrium limitations on the vapor–liquid–solid growth of epitaxial silicon nanowires using SiCl4

标题
Gas phase equilibrium limitations on the vapor–liquid–solid growth of epitaxial silicon nanowires using SiCl4
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 26, Issue 17, Pages 2207-2214
出版商
Cambridge University Press (CUP)
发表日期
2011-07-04
DOI
10.1557/jmr.2011.144

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