Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition

标题
Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 25, Issue 10, Pages 1898-1903
出版商
Cambridge University Press (CUP)
发表日期
2010-09-28
DOI
10.1557/jmr.2010.0245

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