Thermal oxidation mechanism and stress evolution in Ta thin films

标题
Thermal oxidation mechanism and stress evolution in Ta thin films
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 25, Issue 06, Pages 1080-1086
出版商
Cambridge University Press (CUP)
发表日期
2010-05-24
DOI
10.1557/jmr.2010.0157

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