Thermal annealing of amorphous Ti–Si–O thin films

标题
Thermal annealing of amorphous Ti–Si–O thin films
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 23, Issue 03, Pages 755-759
出版商
Cambridge University Press (CUP)
发表日期
2008-03-01
DOI
10.1557/jmr.2008.0088

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