Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure

标题
Effects of HfO2 buffer layer thickness on the properties of Pt/SrBi2Ta2O9/HfO2/Si structure
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 23, Issue 07, Pages 2023-2032
出版商
Cambridge University Press (CUP)
发表日期
2008-07-01
DOI
10.1557/jmr.2008.0248

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