Control of stoichiometry, microstructure, and mechanical properties in SiC coatings produced by fluidized bed chemical vapor deposition

标题
Control of stoichiometry, microstructure, and mechanical properties in SiC coatings produced by fluidized bed chemical vapor deposition
作者
关键词
-
出版物
JOURNAL OF MATERIALS RESEARCH
Volume 23, Issue 06, Pages 1785-1796
出版商
Cambridge University Press (CUP)
发表日期
2008-06-02
DOI
10.1557/jmr.2008.0220

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