Analysis of current transients for voltage pulse-modulated surface processing: Application to anodic electro-dissolution of copper for electrochemical mechanical planarization

标题
Analysis of current transients for voltage pulse-modulated surface processing: Application to anodic electro-dissolution of copper for electrochemical mechanical planarization
作者
关键词
-
出版物
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 209, Issue 3, Pages 1189-1198
出版商
Elsevier BV
发表日期
2008-03-26
DOI
10.1016/j.jmatprotec.2008.03.022

向作者/读者发起求助以获取更多资源

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now