A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling

标题
A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling
作者
关键词
-
出版物
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 201, Issue 1-3, Pages 548-553
出版商
Elsevier BV
发表日期
2007-12-06
DOI
10.1016/j.jmatprotec.2007.11.180

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