Complex three-dimensional conformal surfaces formed by atomic layer deposition: computation and experimental verification

标题
Complex three-dimensional conformal surfaces formed by atomic layer deposition: computation and experimental verification
作者
关键词
-
出版物
JOURNAL OF MATERIALS CHEMISTRY
Volume 19, Issue 48, Pages 9126
出版商
Royal Society of Chemistry (RSC)
发表日期
2009-11-06
DOI
10.1039/b914318a

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