4.2 Article

Stressed Silicon Nitride Nanomechanical Resonators at Helium Temperatures

期刊

JOURNAL OF LOW TEMPERATURE PHYSICS
卷 171, 期 5-6, 页码 731-736

出版社

SPRINGER/PLENUM PUBLISHERS
DOI: 10.1007/s10909-012-0693-5

关键词

Nanomechanical resonators; Nonlinear; Magnetomotive

资金

  1. MICROKELVIN
  2. EU FRP7 low temperature infrastructure grant [228464]
  3. ANR French grant QNM [040401]

向作者/读者索取更多资源

We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 10(4). We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.2
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据