4.7 Article

Metal Grating Patterning on Fiber Facets by UV-Based Nano Imprint and Transfer Lithography Using Optical Alignment

期刊

JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 27, 期 10, 页码 1417-1422

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2008.2004955

关键词

Alignment; gold grating; nano imprint lithography; optical fiber; silicon-on-insulator

资金

  1. European Union through IST-ePIXnet
  2. Belgian IAP-PHOTON
  3. IAP-Photonics@be project
  4. Ghent University
  5. Institute for the Promotion of Innovation through Science and Technology in Flanders (IWT-Vlaanderen)

向作者/读者索取更多资源

UV-based nano imprint and transfer lithography (NITL) is proposed as a flexible, low cost and versatile approach for defining sub-micron metal patterns on optical fiber facets in a single-processing step. NITL relies on a specially prepared mold carrying the pattern that is to be transferred to the facet. The fiber's light-guiding properties allow control of the position of the metal structures by optical alignment.

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