Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication

标题
Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication
作者
关键词
-
出版物
JOURNAL OF LASER APPLICATIONS
Volume 21, Issue 4, Pages 196-204
出版商
Laser Institute of America
发表日期
2010-03-30
DOI
10.2351/1.3263118

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