期刊
OPTICS AND LASER TECHNOLOGY
卷 69, 期 -, 页码 1-7出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlastec.2014.12.012
关键词
Thin films; Optical resonance; Sensors
资金
- Spanish Ministry of Education and Science-FEDER [TEC2013-43679-R]
Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields. (C) 2014 Elsevier Ltd. All rights reserved.
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