Si Doping of GaN in Hydride Vapor-Phase Epitaxy

标题
Si Doping of GaN in Hydride Vapor-Phase Epitaxy
作者
关键词
HVPE, GaN, bulk, Si doping, defects, strain
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 42, Issue 5, Pages 820-825
出版商
Springer Nature
发表日期
2012-12-20
DOI
10.1007/s11664-012-2373-2

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