Femtosecond Laser Drilling of Alumina Wafers

标题
Femtosecond Laser Drilling of Alumina Wafers
作者
关键词
-
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 38, Issue 9, Pages 2006-2012
出版商
Springer Nature
发表日期
2009-05-05
DOI
10.1007/s11664-009-0811-6

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