Silicon Nitride Films Deposited by RF Sputtering for Microstructure Fabrication in MEMS

标题
Silicon Nitride Films Deposited by RF Sputtering for Microstructure Fabrication in MEMS
作者
关键词
-
出版物
JOURNAL OF ELECTRONIC MATERIALS
Volume 38, Issue 9, Pages 1979-1989
出版商
Springer Nature
发表日期
2009-06-03
DOI
10.1007/s11664-009-0846-8

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