4.0 Article

Transparent Electronics for See-Through AMOLED Displays

期刊

JOURNAL OF DISPLAY TECHNOLOGY
卷 5, 期 12, 页码 501-508

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JDT.2009.2023093

关键词

Active matrix organic light-emitting diodes (OLED); bias stress; passivation; stability; transparent thin-film transistors (TFTs); zinc-tin-oxide (ZTO)

资金

  1. German Federal Ministry for Education and Research BMBF [FKZ 13N9152]
  2. Deutsche Forschungsgemeinschaft (DFG)

向作者/读者索取更多资源

Transparent thin-film-transistors (TFTs) with a channel semiconductor based on the zinc-tin-oxide (ZTO) system are presented. Specifically, the technological and material aspects of the plasma-assisted pulsed laser deposition of these materials are discussed. The supply of additional radical oxygen species will be evidenced to significantly reduce defects in the material and as a consequence allows for well-behaved n-channel TFTs with mobilities higher than 10 cm(2)V(-1)s(-1) and a threshold voltage in the range of 0 V. In addition the devices are extremely stable versus bias/current stress, which is especially important for active matrix OLED applications. Based on a detailed understanding of the interaction of the TFT channels with oxygen a strategy for the thin-film encapsulation of the TFTs will be presented, which leaves their device characteristics unaffected.

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