On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide

标题
On the use of methane as a carbon precursor in Chemical Vapor Deposition of silicon carbide
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 390, Issue -, Pages 24-29
出版商
Elsevier BV
发表日期
2014-01-04
DOI
10.1016/j.jcrysgro.2013.12.033

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