Effect of thermocouple position on temperature field in nitride MOCVD reactor

标题
Effect of thermocouple position on temperature field in nitride MOCVD reactor
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 368, Issue -, Pages 29-34
出版商
Elsevier BV
发表日期
2013-02-01
DOI
10.1016/j.jcrysgro.2013.01.005

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