Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition

标题
Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 312, Issue 15, Pages 2215-2219
出版商
Elsevier BV
发表日期
2010-05-06
DOI
10.1016/j.jcrysgro.2010.04.048

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