Evolution of Si suboxides into Si nanocrystals during rapid thermal annealing as revealed by XPS and Raman studies

标题
Evolution of Si suboxides into Si nanocrystals during rapid thermal annealing as revealed by XPS and Raman studies
作者
关键词
-
出版物
JOURNAL OF CRYSTAL GROWTH
Volume 311, Issue 5, Pages 1296-1301
出版商
Elsevier BV
发表日期
2008-12-26
DOI
10.1016/j.jcrysgro.2008.12.038

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