期刊
JOURNAL OF CRYSTAL GROWTH
卷 310, 期 3, 页码 545-550出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2007.10.084
关键词
electron energy loss spectrometry; transmission electron microscopy; molecular beam epitaxy; TiO2
We have studied the microstructure of TiO2 films, grown by reactive molecular beam epitaxy (MBE) on LaAlO3 (LAO) and SrTiO3 (STO) substrates, using a combination of transmission electron microscopy (TEM) and electron energy loss spectrometry (EELS). TiO2 films grew epitaxially in the anatase polymorph and exhibited the crystallographic orientation relation of (001)(010)(TiO2)parallel to(001)(010)(substrate). High-resolution TEM and EELS studies indicated the presence of a cubic TiOx phase at the TiO2/STO interface. Interfacial TiOx phases were eliminated and a sharp TiO2/STO interface was achieved by growing the TiO2 film on a heteroepitaxial STO buffer layer. (C) 2007 Elsevier B.V. All rights reserved.
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