Mechanical micromachining: a sustainable micro-device manufacturing approach?

标题
Mechanical micromachining: a sustainable micro-device manufacturing approach?
作者
关键词
-
出版物
JOURNAL OF CLEANER PRODUCTION
Volume 17, Issue 7, Pages 662-667
出版商
Elsevier BV
发表日期
2008-12-25
DOI
10.1016/j.jclepro.2008.11.012

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