Effects of Mg concentration on solubility and chemical state of N in N-doped MgZnO alloy

Solubility and chemical state of N in an N-doped MgxZn1-xO film were studied by using Raman and x-ray photoelectron spectroscopy. Three anomalous Raman peaks are observed at 272, 580, and 642 cm(-1), respectively, and are demonstrated to be only related to substitution of N for O site (NO) but not to substitution of N-2 for O site (N-2) O. The solubility of the N-O is dominated by Mg concentration and chemical potentials of N and O in growth condition. The chemical state of the N can change from coexistence of (N-2)O and NO to single (N-2)O with increasing Mg concentration. (C) 2010 American Institute of Physics. [doi:10.1063/1.3505636]