Review
Chemistry, Physical
Katarzyna Racka-Szmidt, Bartlomiej Stonio, Jaroslaw Zelazko, Maciej Filipiak, Mariusz Sochacki
Summary: This paper provides a review of the inductively coupled plasma reactive ion etching (ICP-RIE) method for silicon carbide etching. The experimental results show that the addition of O-2 and changes in RIE and ICP power have an impact on the etching rate of the Cr mask and the selectivity of SiC/Cr etching. SiC, with its attractive properties, holds great potential benefits for advances in submicron semiconductor processing technology.
Article
Engineering, Electrical & Electronic
Yanming Xia, Zetian Wang, Lu Song, Wei Wang, Jing Chen, Shenglin Ma
Summary: Tungsten is a promising material for MEMS applications, but it is challenging to fabricate microstructures with high aspect ratios and small feature sizes due to its excellent properties. In this study, an inductively coupled plasma (ICP) deep etching process was developed for bulk tungsten, and successfully achieved microstructures with high aspect ratios and small feature sizes, demonstrating its potential application prospect.
SENSORS AND ACTUATORS A-PHYSICAL
(2022)
Article
Nanoscience & Nanotechnology
Fabian Kaufmann, Giovanni Finco, Andreas Maeder, Rachel Grange
Summary: Lithium niobate on insulator is becoming a versatile platform for new photonic integrated devices. Progress has been made to improve the fabrication of optical circuits on a large scale, and the performance has reached remarkable levels. However, the argon etching process is still challenging to optimize due to micro-masking effects and low etch mask selectivity. A workflow is presented to identify the best etching results, and three methods are proposed to achieve redeposition-free lithium niobate etching with good sidewall quality without the need for wet chemistry.
Article
Nanoscience & Nanotechnology
Maha Yusuf, George K. Herring, Lars Thorben Neustock, Mohammad Asif Zaman, Usha Raghuram, Vijay K. Narasimhan, Charmaine Chia, Roger T. Howe
Summary: High-contrast alignment marks are essential for precise alignment in X-ray imaging systems. The use of nanostructured black silicon (n-BSi) and optimized deep reactive-ion etching (DRIE) process allows for the fabrication of absorptive areas with low reflectance and high contrast ratio. Systematic variation of polymer deposition time T leads to various nanostructures, ultimately improving the efficiency and precision of alignment marks.
ACS APPLIED NANO MATERIALS
(2021)
Article
Chemistry, Physical
Hee Ju Kim, Long Wen, Doo San Kim, Ki Hyun Kim, Jong Woo Hong, Won Jun Chang, Soo Namgoong, Dong Woo Kim, Geun Young Yeom
Summary: The etch characteristics of silicon trenches masked with various SiO2/Si3N4 pattern distances were investigated using different pulse modes in Ar/Cl-2 inductively coupled plasmas. The results showed that using synchronously and asynchronously pulse modes instead of continuous wave (CW) mode increased the selectivity between Si and the mask layer and reduced the etch rate differences between wide and narrow pattern distance patterns (ARDE). The improvements in etch selectivity and reduction of ARDE were attributed to the increased conduction of Cl radicals/byproducts and time separated etch cycle composed of Cl chemical adsorption and removal of chemisorbed species.
APPLIED SURFACE SCIENCE
(2022)
Article
Chemistry, Physical
Taito Yoshie, Kenji Ishikawa, Thi-Thuy-Nga Nguyen, Shih-Nan Hsiao, Takayoshi Tsutsumi, Makoto Sekine, Masaru Hori
Summary: In the fabrication of semiconductor devices, the feature profiles of high-aspect-ratio Si trenches need to be controlled considering aspect-ratio-dependent etching. This control is achieved by a cyclic process involving sustained Ar plasma, alternating injection of C4F8 and SF6, and short-period substrate bias supply. The transient behaviors of gaseous and surface reactions are currently revealed through measurement of plasma parameters using a surface wave probe and optical emission spectroscopy. By fluorinating the etched surface during the cycle and controlling the bias-supply timing, an ARDE-free Si trench feature profile can be fabricated.
APPLIED SURFACE SCIENCE
(2023)
Article
Chemistry, Multidisciplinary
Ye-Bin You, Young-Seok Lee, Si-Jun Kim, Chul-Hee Cho, In-Ho Seong, Won-Nyoung Jeong, Min-Su Choi, Shin-Jae You
Summary: This research reveals that the concentration of oxygen radicals measured by OES does not exactly match the ashing rate in the oxygen plasma ashing process. Considering plasma parameters, such as electron density, can solve this issue.
Article
Chemistry, Analytical
Yuyu Zhang, Yu Wu, Quanquan Sun, Lifeng Shen, Jie Lan, Lingxi Guo, Zhenfeng Shen, Xuefang Wang, Junfeng Xiao, Jianfeng Xu
Summary: Micro-optical gyroscopes (MOGs) are able to miniaturize, lower costs, and allow for batch processing of fiber-optic gyroscope (FOG) components by placing them on a silicon substrate. This study investigated different processes, such as the Bosch process, pseudo-Bosch process, and cryogenic etching process, to fabricate high-precision waveguide trenches on silicon. The selection of appropriate mask materials, such as SiO2, can suppress undercut caused by charges in the Al mask layer. Using a cryogenic process at -100°C, ultra-long spiral trenches with specific dimensions and smooth sidewalls were successfully obtained.
Article
Materials Science, Multidisciplinary
Gagik Ayvazyan, Karen Ayvazyan, Levon Hakhoyan, Alina Semchenko
Summary: This study investigates the possibility and promise of using a resistive sensor based on pristine black silicon (BSi) to detect nitrogen dioxide (NO2) at room temperature. The results show that the BSi-based sensor exhibits high sensitivity, fast transient response, good repeatability, and excellent selectivity. With further optimization, BSi has good potential as a functional material for gas sensors.
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS
(2023)
Article
Engineering, Electrical & Electronic
David Schmelz, Thomas Kasebier, Zhitian Shi, Qixiang Cheng, Natali Sergeev, Detlef Schelle, Uwe Zeitner
Summary: Valuable research on black silicon (b-Si) nanostructures has led to its increased application. However, existing research focuses on flat substrates. This study investigated b-Si structures on curved surfaces by fabricating them on hemispherical silicon lenses using inductively coupled plasma reactive ion etching. Different structure morphologies were achieved based on the etching parameters selected, similar to fabrication on Si wafers. Scanning electron microscopy inspections confirmed the homogeneity and orientation of the structures, while simulations explained the underlying etching process.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2023)
Article
Chemistry, Physical
Yongjae Kim, Hojin Kang, Heeju Ha, Changkoo Kim, Sungmin Cho, Heeyeop Chae
Summary: This study developed a plasma atomic layer etching (ALE) process for molybdenum (Mo) using surface fluorination and ion bombardment. The Mo surface was fluorinated with CHF3 or C4F8 plasmas, and then etched with Ar plasma. The ALE process achieved a low fluorine residue (4%) and surface roughness (0.37 nm), making it superior to radical etching and RIE processes.
APPLIED SURFACE SCIENCE
(2023)
Article
Nanoscience & Nanotechnology
Melissa J. Goodwin, Cornelis A. M. Harteveld, Meint J. de Boer, Willem L. Vos
Summary: Periodic arrays of deep nanopores in silicon are important for silicon nanophotonics. Previous studies focused on achieving deep nanopores with high aspect ratios, but resulted in structural imperfections. This study aims to realize cylindrical nanopores for better comparison with theory and simulations. By optimizing etching parameters and implementing a multistep process, cylindrical nanopores with high aspect ratios were achieved, suitable for silicon nanophotonic structures.
Review
Chemistry, Multidisciplinary
Philip A. Doble, Raquel Gonzalez de Vega, David P. Bishop, Dominic J. Hare, David Clases
Summary: Elemental imaging provides insights into the chemical composition of living organisms, with potential applications in understanding disease states. Laser ablation-inductively coupled plasma-mass spectrometry (LA-ICP-MS) has emerged as a principal elemental imaging technique for biologists.
Article
Chemistry, Analytical
Hanul Lee, Seongkyong Joo, Dongchul Suh
Summary: Chloride ions in Hf precursors used as high-dielectric constant insulators in semiconductor processes were successfully detected using double-focusing sector field high resolution inductively coupled plasma mass spectrometry. A dilution method using a polar solvent was applied to overcome the precipitation issue. The method showed excellent ability to detect chloride ions in a large number of samples without complicated pretreatment conditions.
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
(2023)
Article
Chemistry, Analytical
Aimei Hong, Qing Tang, Ashfeen Ubaid Khan, Maozhong Miao, Zhenlan Xu, Fei Dang, Qian Liu, Yawei Wang, Daohui Lin, Juliane Filser, Lingxiangyu Li
Summary: A new method for the identification and speciation of nanoscale silver in soils and sediments has been developed, using a sequential extraction technique coupled with inductively coupled plasma optical emission spectrometry. Optimal extraction conditions were determined and the method was validated for its effectiveness in analyzing the distribution of different forms of silver nanoparticles in complex matrices.
ANALYTICAL CHEMISTRY
(2021)
Article
Materials Science, Multidisciplinary
Paul Schmitt, Nadja Felde, Thorsten Dohring, Manfred Stollenwerk, Ingo Uschmann, Kevin Hanemann, Marie Siegler, Georg Klemm, Nancy Gratzke, Andreas Tunnermann, Stefan Schwinde, Sven Schroder, Adriana Szeghalmi
Summary: Metallic coatings, especially iridium, are crucial for infrared optical systems due to their high reflectivity and thermal stability. The properties of iridium coatings deposited by atomic layer deposition (ALD) and magnetron sputtering (MS) differ due to their different topography and microstructure.
OPTICAL MATERIALS EXPRESS
(2022)
Article
Optics
Anne-Sophie Munser, Marcus Trost, Sven Schroeder, Martina Graf, Miriam A. Rosenbaum, Andreas Tuennermann
Summary: Due to its high sensitivity and quick measurement principle, angle-resolved scattering (ARS) measurements show promising potential as a rapid analysis tool for bacterial cells, especially at small sample sizes and low cell numbers. This study has demonstrated that scattered light from various bacterial cell samples can be analyzed at the single-cell level, which is a significant benefit compared to time-consuming conventional methods that require hours or days of cellular growth. With the proposed setup and data analysis method, it is possible to detect scatter differences among cell types as well as measure cell concentration.
Article
Chemistry, Multidisciplinary
Nabarun Polley, Samim Sardar, Peter Werner, Ingo Gersonde, Yuya Kanehira, Ilko Bald, Daniel Repp, Thomas Pertsch, Claudia Pacholski
Summary: In this research, optical fibers equipped with plasmonic flow sensors were fabricated as photothermomechanical nanopumps for active transport of target analytes. The nanopumps were prepared by stacking a thermoresponsive polymer monolayer and a plasmonic nanohole array on an optical fiber tip. The pump mechanism relied on the temperature-dependent collapse and swelling of the polymer, while the required heat was generated by the photo thermal effect in the plasmonic nanohole array. Simultaneous detection of analytes was achieved by monitoring changes in the plasmonic sensor's optical response. The active mass transport through the nanohole array was visualized using particle imaging velocimetry. The presence of the pump mechanism led to a 4-fold increase in sensitivity compared to the purely photothermal effect, demonstrating the potential of these photothermomechanical nanopumps for sensing applications.
Article
Optics
Angela Barreda, Athira Kuppadakkath, Lilit Ghazaryan, Ziyang Gan, Kirill Koshelev, Tobias Bucher, Thomas Pertsch, Antony George, Andrey Turchanin, Adriana Szeghalmi, Yuri Kivshar, Duk-Yong Choi, Isabelle Staude, Falk Eilenberger
Summary: This study investigates the influence of absorption losses on the Q-factor values of an a-Si:H metasurface, finding that an increase in optical losses decreases the Q-factor values and may even prevent the excitation of q-BIC resonance. The research paves the way for designing metasurfaces suitable for growing 2D materials directly on them.
JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER
(2022)
Article
Optics
Daniel Repp, Angela Barreda, Francesco Vitale, Isabelle Staude, Ulf Peschel, Carsten Ronning, Thomas Pertsch
Summary: Semiconductor nanowire lasers can have their lasing threshold modified by their environment, and using metallic substrates can access low-volume Surface-Plasmon-Polariton (SPP) modes and describe mode competition in nanowire lasers. The study found that an aluminum substrate decreases the lasing threshold for ZnO nanowire lasers, while a silver substrate increases the threshold compared to a dielectric substrate. These findings allow for predictions about the interaction between planar metals and semiconductor nanowires, guiding future improvements in highly-integrated laser sources.
Article
Materials Science, Multidisciplinary
Chengjun Zou, Purushottam Poudel, Sarah L. Walden, Katsuya Tanaka, Alexander Minovich, Thomas Pertsch, Felix H. Schacher, Isabelle Staude
Summary: Tunability is crucial for practical applications of high-efficiency metasurface-based nanophotonic devices and systems. The research in this area has made significant progress in terms of tuning mechanisms, speed, and active functionalities. However, most of the demonstrated works are based on a single type of physical stimulus, which limits the modulation range and design options of the metadevices. This article experimentally demonstrates that multi-responsive metasurfaces can be achieved by combining asymmetric, highly resonant metasurfaces with multi-responsive polymeric materials, providing new design freedom for multifunctional metadevices.
ADVANCED OPTICAL MATERIALS
(2023)
Article
Optics
Valerio Flavio Gili, Dupish Dupish, Andres Vega, Massimo Gandola, Enrico Manuzzato, Matteo Perenzoni, Leonardo Gasparini, Thomas Pertsch, Frank Setzpfandt
Summary: Quantum ghost imaging (QGI) is an imaging protocol that exploits photon-pair correlations from spontaneous parametric down-conversion (SPDC). In this study, a two-dimensional single-photon avalanche diode (SPAD) array detector is used for spatially resolving the path in QGI implementation. By utilizing non-degenerate SPDC, samples can be investigated at infrared wavelengths without the need for SWIR cameras, while spatial detection can still be performed in the visible region using silicon-based technology. These findings advance QGI schemes for practical applications.
Article
Physics, Applied
F. Vitale, D. Repp, T. Siefke, U. Zeitner, U. Peschel, T. Pertsch, C. Ronning
Summary: In this study, a mode selection scheme based on distributed feedback was proposed to achieve quasi-single mode lasing action in plasmonic nanowires. The orientation of the nanowire on the grating was found to affect the emission spectrum, with an additional peak emerging when the nano-cavity was perpendicular to the ridge direction. This peak was attributed to a hybrid mode dominating the mode competition and supported by localized plasmon polaritons on the metal grating ridges.
APPLIED PHYSICS LETTERS
(2023)
Article
Optics
Aso Rahimzadegan, Sergey Lepeshov, Wenjia Zhou, Duk-Yong Choi, Juergen Sautter, Dennis Arslan, Chengjun Zou, Stefan Fasold, Carsten Rockstuhl, Thomas Pertsch, Yuri Kivshar, Isabelle Staude
Summary: Introduced metasurfaces as promising candidates to replace bulky optical components, and explored dielectric metasurfaces with complex supercells composed of Mie-resonant dielectric nanocylinders and nanoscale rings. Demonstrated the signature of an optical response relying on staggered optically induced magnetic dipole moments, and suggested possible applications in resonant nanophotonics by broadening the modulation capabilities of metasurfaces.
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS
(2023)
Article
Optics
Yunus Denizhan Sirmaci, Angela Barreda Gomez, Thomas Pertsch, Jens H. Schmid, Pavel Cheben, Isabelle Staude
Summary: The paper proposes and demonstrates a novel silicon nanophotonic waveguide consisting of a chain of resonantly forward scattering nanoparticles with spectrally overlapping electric and magnetic dipolar Mie-type resonances. The propagation loss of the meta-waveguides in the telecom spectral range is as low as 0.4 dB mm(-1), surpassing the current record for Mie-resonant waveguides by more than an order of magnitude. The meta-waveguides also support a negative group index over a broad spectral range and exhibit regions of vanishing and anomalous dispersion within the transmission band. Furthermore, compact resonance-protected waveguide bends and efficient splitters can be implemented within just 320 nm propagation length.
LASER & PHOTONICS REVIEWS
(2023)
Article
Materials Science, Multidisciplinary
Viktor Bender, Tobias Bucher, Mohammad Nasimuzzaman Mishuk, Yuxuan Xie, Isabelle Staude, Falk Eilenberger, Kurt Busch, Thomas Pertsch, Bayarjargal N. Tugchin
Summary: Photoluminescence spectroscopy is used to study the excitonic properties of mechanically exfoliated monolayer MoS2 under various physical and chemical stimuli. The study characterizes midgap exciton states originating from lattice defects and compares them to existing models. Statistical data analyses reveal a photoluminescence enhancement through physisorption of water molecules on the controversial excited-state A biexciton (AXX*). Additionally, the study shows that surface roughness does not account for changes in doping level within monolayer MoS2 on gold substrates, and reports a shift in the electron-phonon coupling properties due to physisorbed water films on top of the samples.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
(2023)
Article
Nanoscience & Nanotechnology
Maryam Moradi, Isabelle Staude, Thomas Pertsch, Michael Jaeger, Ulrich S. Schubert
Summary: By utilizing a spin-coating-based sample fabrication procedure, we developed a gold-quantum dot hybrid system that exhibited reversible photoluminescence switching in response to redox processes. The system relied on a nanometric thick polymer spacer layer that was redox-responsive, enabling attachment of the quantum dots to a gold film. The study demonstrated a reversible and reproducible 2.3 ± 0.6-fold photoluminescence intensity switching factor upon oxidation and reduction of the spacer layer.
ACS APPLIED NANO MATERIALS
(2023)
Article
Optics
Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel Penagos S. Molina, Robert Klas, Alexander Iliou, Michael Steinert, Sebastian Herkersdorf, Alexander Kirsche, Thomas Pertsch, Falk Hillmann, Jens Limpert, Jan Rothhardt
Summary: Table-top extreme ultraviolet (EUV) microscopy provides new possibilities for studying biological samples without using labels. In this study, we demonstrate ptychographic EUV imaging of dried, unstained model specimens, such as germlings of a fungus and bacteria cells, at a wavelength of 13.5 nm. By using a position-correlated ptychography approach, we achieve a millimeter-squared field of view with sub-60 nm spatial resolution, enabling the identification of nanoscale material composition inside the specimens. This work will advance EUV imaging applications and open up new possibilities in life science research.
Proceedings Paper
Optics
Mina Afsharnia, Saher Junaid, Sina Saravi, Thomas Pertsch, Markus A. Schmidt, Frank Setzpfandt
Summary: In this experiment, we have successfully demonstrated the generation of frequency non-degenerate correlated photon pairs with more than 1 μm spectral distance in a liquid-core microstructured optical fiber through four-wave mixing.
2022 PHOTONICS NORTH (PN)
(2022)
Article
Physics, Multidisciplinary
Andres Vega, Elkin A. Santos, Jorge Fuenzalida, Marta Gilaberte Basset, Thomas Pertsch, Markus Graefe, Sina Saravi, Frank Setzpfandt
Summary: Quantum imaging with undetected photons achieves high resolution by imaging objects illuminated with idler photons through measuring signal photons. In this study, we theoretically investigate the resolution of this nonlocal imaging scheme and prove that it is diffraction limited to the longer wavelength of the signal and idler pairs.
PHYSICAL REVIEW RESEARCH
(2022)
