Fabrication and characterization of germanium-on-insulator through epitaxy, bonding, and layer transfer

标题
Fabrication and characterization of germanium-on-insulator through epitaxy, bonding, and layer transfer
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 116, Issue 10, Pages 103506
出版商
AIP Publishing
发表日期
2014-09-10
DOI
10.1063/1.4895487

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