4.6 Article

Incorporation model of N into GaInNAs alloys grown by radio-frequency plasma-assisted molecular beam epitaxy

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JOURNAL OF APPLIED PHYSICS
卷 116, 期 21, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4903318

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  1. Finnish Funding Agency for Technology and Innovation-TEKES [40120/09, 40239/12]
  2. Graduate School in Electronics, Telecommunications and Automation
  3. Ulla Tuominen Foundation
  4. Finnish Foundation for Technology Promotion
  5. Wartsila Foundation

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We present a Maxwell-Boltzmann electron energy distribution based model for the incorporation rate of nitrogen into GaInNAs grown by molecular beam epitaxy (MBE) using a radio frequency plasma source. Nitrogen concentration is predicted as a function of radio-frequency system primary resistance, N flow, and RF power, and group III growth rate. The semi-empirical model is shown to be repeatable with a maximum error of 6%. The model was validated for two different MBE systems by growing GaInNAs on GaAs(100) with variable nitrogen composition of 0%-6%. (C) 2014 AIP Publishing LLC.

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