Infrared spectroscopic and modeling studies of H2/CH4 microwave plasma gas phase from low to high pressure and power

标题
Infrared spectroscopic and modeling studies of H2/CH4 microwave plasma gas phase from low to high pressure and power
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 116, Issue 9, Pages 093301
出版商
AIP Publishing
发表日期
2014-09-05
DOI
10.1063/1.4894778

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