4.6 Article

The role of contact size on the formation of Schottky barriers and ohmic contacts at nanoscale metal-semiconductor interfaces

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JOURNAL OF APPLIED PHYSICS
卷 111, 期 6, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3693542

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  1. U.S. Department of Energy [DE-FG02-00ER45813-A000]
  2. National Science Foundation IGERT [DGE02-21664]
  3. U.S. Department of Energy (DOE) [DE-FG02-00ER45813] Funding Source: U.S. Department of Energy (DOE)

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We have measured the electronic structure at Au nanoisland-niobium doped SrTiO3 interfaces over a range of contact diameters. Electron transport processes at the interface transition from thermionic emission dominated to tunneling dominated, leading to ohmic behavior at small sizes. The transition increases at a much higher rate than is generally expected, emphasizing the need for precise control of nanoscale dimensions for reproducible effects in nanoscale electronic devices. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3693542]

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