Understanding Si(111) solid phase epitaxial regrowth using Monte Carlo modeling: Bi-modal growth, defect formation, and interface topology

标题
Understanding Si(111) solid phase epitaxial regrowth using Monte Carlo modeling: Bi-modal growth, defect formation, and interface topology
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 112, Issue 2, Pages 024327
出版商
AIP Publishing
发表日期
2012-08-01
DOI
10.1063/1.4739733

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