Reuse of GaAs substrates for epitaxial lift-off by employing protection layers

标题
Reuse of GaAs substrates for epitaxial lift-off by employing protection layers
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 3, Pages 033527
出版商
AIP Publishing
发表日期
2012-02-16
DOI
10.1063/1.3684555

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