Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators

标题
Correlations between microstructure and Q-factor of tunable thin film bulk acoustic wave resonators
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 5, Pages 054102
出版商
AIP Publishing
发表日期
2011-09-07
DOI
10.1063/1.3626939

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