Stress-controlled Pb(Zr0.52Ti0.48)O3 thick films by thermal expansion mismatch between substrate and Pb(Zr0.52Ti0.48)O3 film

标题
Stress-controlled Pb(Zr0.52Ti0.48)O3 thick films by thermal expansion mismatch between substrate and Pb(Zr0.52Ti0.48)O3 film
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 12, Pages 124101
出版商
AIP Publishing
发表日期
2011-12-17
DOI
10.1063/1.3669384

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