Bending in VO2-coated microcantilevers suitable for thermally activated actuators

标题
Bending in VO2-coated microcantilevers suitable for thermally activated actuators
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 7, Pages 074506
出版商
AIP Publishing
发表日期
2010-04-12
DOI
10.1063/1.3369282

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