Fabrication and subband gap optical properties of silicon supersaturated with chalcogens by ion implantation and pulsed laser melting

标题
Fabrication and subband gap optical properties of silicon supersaturated with chalcogens by ion implantation and pulsed laser melting
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 12, Pages 123506
出版商
AIP Publishing
发表日期
2010-06-18
DOI
10.1063/1.3415544

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