Simulations of chemical vapor deposition diamond film growth using a kinetic Monte Carlo model

标题
Simulations of chemical vapor deposition diamond film growth using a kinetic Monte Carlo model
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 108, Issue 1, Pages 014905
出版商
AIP Publishing
发表日期
2010-07-09
DOI
10.1063/1.3437647

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